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材料簡(jiǎn)介
Introduction
FLH331是由合成砂制成的石英材料,具有純度高、少氣泡,無(wú)包裹體、透過(guò)率高、耐刻蝕、耐高溫等特性。
可運(yùn)用于半導(dǎo)體先進(jìn)制程、光學(xué)、化學(xué)加工、紫外線和高溫窗口等。
FLH331 is a quartz material made of synthetic sand. Thanks to the high purity, few bubbles, no inclusions, high transmittance, etching resistance, high temperature resistance and other characteristics,F(xiàn)LH331 could be used in advanced semiconductor manufacturing process, optics, chemical processing, ultraviolet and high temperature windows,etc.
雜質(zhì)含量
Chemical purity
FLH331 雜質(zhì)元素典型值 (ppm)
Al
0.14
B
0
Ca
0.41
Co
0
Cu
0
Fe
0.13
K
0
Li
0
Mg
0.06
Mn
0
Na
0.29
Ni
0
Ti
0
OH
200
紫外光譜透過(guò)性能
UV spectral transmittance
氣泡及異物情況
Bubbles and inclusions
氣泡及異物數(shù)量 (100g玻璃中允許)
The allowable number of bubbles and foreign matter per 100g of glass
氣泡直徑(mm)及個(gè)數(shù)
The diameter(mm) and number of bubbles
0.03~0.30
0
0.31~0.70
0
>0.7
0
總數(shù)個(gè)
0
透明或不透明雜質(zhì)的直徑(mm)及個(gè)數(shù)
The diameter (mm) and number of transparent or opaque impurities
0.3~0.7
0
0.8~1.0
0
1.1~3.0
0
總數(shù)個(gè)
0
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